Mechanical seals with elastomeric bellow
Rotary joint for vacuum
Manufacturing processes, which run under vacuum, require drives for transport, handling or process support whose shafts have to be sealed to the atmosphere. It could additionally be necessary to lead in the cooling media or to load electrical energy through the shaft. If the bearing is designed accordingly a rotary joint for vacuum may directly represent the bearing of the rotating part and enable the direct adoption of drive systems.
Rotary drive for plasma process
Vacuum, process gas
200° C
< 50 min-1
Rotary drive for plasma process 2
Vacuum, process gas
< 100° C
20 min-1
Rotary drive for plasma process 3
Vacuum, process gas
200° C
< 10 min-1
